Annales de Physique

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Application du procédé LIGA en micro-optique

S. Basrour, S. Ballandras and D. Hauden

Ann. Phys. Fr., 20 5-6 (1995) 693-700

Published online: 01 June 2004

DOI: 10.1051/anphys:199556063

S. Basrour

S. Ballandras

D. Hauden

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