Free Access
Ann. Phys. Fr.
Volume 19, Number C1, octobre 1994
Page(s) C1-185 - C1-186
Published online 01 June 2004
Ann. Phys. Fr., Vol. 19, N°C1 octobre 1994, pp. C1-185–C1-186
DOI: 10.1051/anphys/1994047

Detection in the nanometer scale of particles generated in an Ar-SiH4 radiofrequency low pressure discharge

L. Boufendi, J. Hermann, E. Stoffels, W. Stoffels and A. Bouchoule

GREMI, UFR Sciences, Université d'Orléans, BP. 6759, 45067 Orléans cedex 2, France

© EDP Sciences 1994
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