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Detection in the nanometer scale of particles generated in an Ar-SiH₄ radiofrequency low pressure discharge

L. Boufendi, J. Hermann, E. Stoffels, W. Stoffels and A. Bouchoule

Ann. Phys. Fr., 19 (1994) C1-185-C1-186

Published online: 01 June 2004

DOI: 10.1051/anphys/1994047

L. Boufendi

J. Hermann

E. Stoffels

W. Stoffels

A. Bouchoule

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