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Source VUV pour les dépots photochimiques de couches minces diélectriques

Y. I. Nissim, J. Flicstein, Y. Vitel, O. Dulac, C. Debauche and C. Licoppe

Ann. Phys. Fr., 19 (1994) C1-229-C1-236

Published online: 01 June 2004

DOI: 10.1051/anphys/1994054

Y. I. Nissim

J. Flicstein

Y. Vitel

O. Dulac

C. Debauche

C. Licoppe

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