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Recuit et gravure induits par laser sur silicium : expériences et simulations numériques

B. Bourguignon, B. Dragnea, B. Boulmer, J.-P. Budin and D. Débarre

Ann. Phys. Fr., 22 (1997) C1-229-C1-236

Published online: 15 February 1997

DOI: 10.1051/anphys/1997045

B. Bourguignon

B. Dragnea

B. Boulmer

J.-P. Budin

D. Débarre

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